Mass Flow Device

FMA-7100, FMA-7200 and FMA-7300

Mass Flow Device

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±1% Full Scale Accuracy
±0.25% of Rate Repeatability
Broad Range in a Single Unit to Fit Most Applications
Field Selectable Soft Start Eliminates Spoiled Batches
Normally Closed Valve
Low Pressure Drop
Compact Design
For Clean, Non-Coating Gases

商品説明

OMEGA™ FMA-7000E Mass Flow Controllers accurately measure gases on the basis of mass flow. The flow sensor produces an electrical output signal linear with the flowrate used for indicating, recording, and/or control purposes. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow. This is accomplished automatically by an electromagnetically actuated flowrate control valve.

OPERATING PRINCIPLE The operating principle of the controller is thermodynamic. A precision power supply directs heat to the midpoint of the sensor tube carrying the flow. On the same tube, equidistant upstream and downstream of the heat input, are resistance temperature measuring elements. With no flow, the heat reaching each temperature element is equal. With increasing flow, the flow stream carries heat away from the upstream element, and carries it towards the downstream element. An increasing temperature difference develops between the two elements and this difference is proportional to the mass flowrate of the gas. A bridge circuit interprets the temperature difference and an amplifier provides the output to the control circuitry as well as a 0-5 Vdc output signal.

SPECIFICATIONS
Accuracy: ±1% FS including linearity at calibration conditions, ±1.5% FS including linearity for flow ranges greater than 20 SLM
Repeatability: ±0.25% of rate
Response Time: <3 second response to within 2% FS final value with a 0 to 100% command step
Set Point Input: 0 to 5 Vdc or 1000Ω potentiometer
Output: 0 to 5 Vdc into 2000Ω minimum load; 3 mV rms max. ripple
Maximum Pressure: 1500 psig, pressure drop 5 to 50 psid
Temperature Range: 4 to 66°C(40 to 150°F) ambient and gas
Temp. Sensitivity:
Zero: < ±0.075% FS per °C
Span: <±1.0% FS shift over 10 to 50°C (50 to 122°F) range
Power Supply Sensitivity: ±0.09% FS per % power supply voltage variation Mounting Attitude Sensitivity: ±0.5% maximum FS deviation after zeroing
Leak Integrity: 1 x 10-9 Atm. scc/sec helium
Control Range: 50 to 1
Pressure Sensitivity: ±0.03% per psi up to 200 psig (N₂)
Power: +15 Vdc at 35 mA DC, -15 Vdc at 180 mA dc, 3.5 watts power consumption
Wetted Parts: 316 and 430SS, FKM
Connections: ¼" stainless steel compression fittings
Electrical Connections: Card edge, 20 terminals, gold over low stress nickel-plated copper
Accessories Included: Mating connector with 1.5 m (5') ribbon cable model. Easy connector/cable assemblies available

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商品説明

FMA-7102E-(*)

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納期:

mass flow meter, 0 to 50 SCCM max range

Accessory Ribbon Cable

FMA-7EC10

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納期:

10 foot ribbon cable connector

FMA-7EC25

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納期:

25 foot ribbon cable connector

FMA-7EC5

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納期:

5 foot ribbon cable connector

FMA-7EC50

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納期:

50 foot ribbon cable connector

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注: Comes complete with mating connector and operator's manual.

Calibrations done at ambient temperature only 20C(70F).

*Please specifiy gas, inlet, and outlet pressure when ordering.

Additional charge for calibrations between 201 and 999 psig and 1000 and 1500 psig.

For NIST certificate add suffix "-NIST" to model number, add $425 to price. NIST certificate does not include points.

All models are custom, consult specification page for a complete product description and list of available models.